Study of the plasma parameters in a high-current pulsed magnetron sputtering...
AbstractResults are presented from experimental studies of the current-voltage characteristics and spatial and temporal parameters of the plasma in a high-current pulsed magnetron sputtering system...
View ArticleOptical studies of plasma inhomogeneities in a high-current pulsed magnetron...
AbstractResults are presented for experimental studies of the plasma glow in a high-current pulsed magnetron discharge by using a high-speed optical frame camera. It is found that the discharge plasma...
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